FIVE NANOMETER UNIT
Newly developed high precision
actuator with resolution of
5 nanometers Application: photo sensor. Increment of 50 nanometersin
a stroke of 1.2mm
Background: A customer had
an open loop actuator (other company’s product) in the
application. Position errors accumulated from every incremental
move, resulting in inaccurate positioning in every cycle.
This SMAC’s new unit
is fully closed, providing extremely accurate position data
and positioning capability with resolution of up to 5 nanometers.
